Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939804 | Formation of composite tungsten films | Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more | 2005-09-06 |
| 6846516 | Multiple precursor cyclical deposition system | Michael Yang, Hyungsuk Alexander Yoon, Hui Zhang, Ming Xi | 2005-01-25 |