Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951804 | Formation of a tantalum-nitride layer | Sean M. Seutter, Ming Xi | 2005-10-04 |
| 6939801 | Selective deposition of a barrier layer on a dielectric material | Hua Chung, Ling Chen, Vincent Ku, Gongda Yao | 2005-09-06 |
| 6939804 | Formation of composite tungsten films | Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more | 2005-09-06 |
| 6911391 | Integration of titanium and titanium nitride layers | Toshio Itoh, Ming Xi | 2005-06-28 |
| 6869516 | Method for removing electrolyte from electrical contacts and wafer touching areas | Dmitry Lubomirsky, Girish Dixit, Vincent E. Burkhart, Allen L. D'Ambra, Yeuk-Fai Edwin Mok +1 more | 2005-03-22 |
| 6846516 | Multiple precursor cyclical deposition system | Hyungsuk Alexander Yoon, Hui Zhang, Hongbin Fang, Ming Xi | 2005-01-25 |