Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939804 | Formation of composite tungsten films | Ken Kaung Lai, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos, Mei Chang +7 more | 2005-09-06 |
| 6936538 | Method and apparatus for depositing tungsten after surface treatment to improve film characteristics | — | 2005-08-30 |
| 6903031 | In-situ-etch-assisted HDP deposition using SiF4 and hydrogen | M. Ziaul Karim, Dongqing Li, Thanh Pham | 2005-06-07 |
| 6855368 | Method and system for controlling the presence of fluorine in refractory metal layers | Moris Kori, Alfred Mak, Lawrence Chung-Lai Lei, Hua Chung | 2005-02-15 |
| 6849545 | System and method to form a composite film stack utilizing sequential deposition techniques | Alfred Mak, Mei Chang, Hua Chung, Ashok Sinha, Moris Kori | 2005-02-01 |