Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929700 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Walter Zygmunt, Tetsuya Ishikawa | 2005-08-16 |
| 6914016 | HDP-CVD deposition process for filling high aspect ratio gaps | Zhengquan Tan, Walter Zygmunt | 2005-07-05 |
| 6908862 | HDP-CVD dep/etch/dep process for improved deposition into high aspect ratio features | Xiaolin Chen, Lin Zhang | 2005-06-21 |
| 6903031 | In-situ-etch-assisted HDP deposition using SiF4 and hydrogen | M. Ziaul Karim, Jeong Soo Byun, Thanh Pham | 2005-06-07 |