Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929700 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Dongqing Li, Tetsuya Ishikawa | 2005-08-16 |
| 6914016 | HDP-CVD deposition process for filling high aspect ratio gaps | Zhengquan Tan, Dongqing Li | 2005-07-05 |