Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958098 | Semiconductor wafer support lift-pin assembly | Rudolf Gujer, Thomas Cho, Lily Pang, Michael P. Karazim | 2005-10-25 |
| 6929700 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Dongqing Li, Walter Zygmunt | 2005-08-16 |
| 6930061 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2005-08-16 |
| 6898065 | Method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system | Brad L. Mays, Sergio Fukuda Shoji | 2005-05-24 |
| 6869896 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2005-03-22 |
| 6853141 | Capacitively coupled plasma reactor with magnetic plasma control | Daniel J. Hoffman, Matthew L. Miller, Jang-Gyoo Yang, Heeyeop Chae, Michael Barnes +1 more | 2005-02-08 |
| D501448 | Electrical connector | — | 2005-02-01 |