Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977098 | Method of uniformly coating a substrate | Emir Gurer, Tom Zhong, John Lewellen, Ed C. Lee, James C. Grambow +3 more | 2005-12-20 |
| 6930061 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2005-08-16 |
| 6896955 | Ionic additives for extreme low dielectric constant chemical formulations | Alexandros T. Demos, Timothy Weidman, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2005-05-24 |
| 6890639 | Very low dielectric constant plasma-enhanced CVD films | — | 2005-05-10 |
| 6891134 | Integrally formed bake plate unit for use in wafer fabrication system | — | 2005-05-10 |
| 6869896 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2005-03-22 |