Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977098 | Method of uniformly coating a substrate | Emir Gurer, Tom Zhong, John Lewellen, Robert P. Mandal, James C. Grambow +3 more | 2005-12-20 |
| 6955720 | Plasma deposition of spin chucks to reduce contamination of Silicon wafers | Emir Gurer, Richard Savage | 2005-10-18 |
| 6911091 | Environment exchange control for material on a wafer surface | Emir Gurer, Tom Zhong, Kevin Golden, John Lewellen, Scott C. Wackerman +1 more | 2005-06-28 |
| 6905547 | Method and apparatus for flexible atomic layer deposition | Ana R. Londergan, Thomas E. Seidel, Lawrence D. Matthysse | 2005-06-14 |
| 6844027 | Environment exchange control for material on a wafer surface | Emir Gurer, Tom Zhong, Kevin Golden, John Lewellen, Scott C. Wackerman +1 more | 2005-01-18 |