Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905547 | Method and apparatus for flexible atomic layer deposition | Ana R. Londergan, Lawrence D. Matthysse, Ed C. Lee | 2005-06-14 |
| 6902624 | Massively parallel atomic layer deposition/chemical vapor deposition system | Adrian Jansz, Jurek Puchacz, Ken Doering | 2005-06-07 |
| 6897119 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Ofer Sneh, Carl Galewski | 2005-05-24 |