Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897119 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Ofer Sneh, Thomas E. Seidel | 2005-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897119 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Ofer Sneh, Thomas E. Seidel | 2005-05-24 |