Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911092 | ALD apparatus and method | — | 2005-06-28 |
| 6897119 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Thomas E. Seidel, Carl Galewski | 2005-05-24 |
| 6897508 | Integrated capacitor with enhanced capacitance density and method of fabricating same | — | 2005-05-24 |
| 6863021 | Method and apparatus for providing and integrating a general metal delivery source (GMDS) with atomic layer deposition (ALD) | — | 2005-03-08 |