Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902624 | Massively parallel atomic layer deposition/chemical vapor deposition system | Thomas E. Seidel, Adrian Jansz, Ken Doering | 2005-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902624 | Massively parallel atomic layer deposition/chemical vapor deposition system | Thomas E. Seidel, Adrian Jansz, Ken Doering | 2005-06-07 |