Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955720 | Plasma deposition of spin chucks to reduce contamination of Silicon wafers | Emir Gurer, Ed C. Lee | 2005-10-18 |
| 6846149 | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system | Frank S. Menagh, Helder R. Carvalheira, Philip A. Troiani, Dan Cossentine, Eric R. Vaughan +1 more | 2005-01-25 |