Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911091 | Environment exchange control for material on a wafer surface | Emir Gurer, Ed C. Lee, Tom Zhong, John Lewellen, Scott C. Wackerman +1 more | 2005-06-28 |
| 6844027 | Environment exchange control for material on a wafer surface | Emir Gurer, Ed C. Lee, Tom Zhong, John Lewellen, Scott C. Wackerman +1 more | 2005-01-18 |