Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936551 | Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices | Farhad Moghadam, Jun Zhao, Timothy Weidman, Rick J. Roberts, Li-Qun Xia | 2005-08-30 |
| 6896955 | Ionic additives for extreme low dielectric constant chemical formulations | Robert P. Mandal, Timothy Weidman, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2005-05-24 |
| 6890403 | Apparatus and process for controlling the temperature of a substrate in a plasma reactor | Jeff S. Cheung | 2005-05-10 |
| 6878644 | Multistep cure technique for spin-on-glass films | Zhenjiang Cui, Rick J. Roberts, Michael S. Cox, Jun Zhao, Khaled A. Elsheref | 2005-04-12 |