Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936551 | Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices | Farhad Moghadam, Jun Zhao, Timothy Weidman, Li-Qun Xia, Alexandros T. Demos | 2005-08-30 |
| 6895776 | Anti-stratification-solution delivery system for spin-on dielectrics | Jun Zhao | 2005-05-24 |
| 6878644 | Multistep cure technique for spin-on-glass films | Zhenjiang Cui, Michael S. Cox, Jun Zhao, Khaled A. Elsheref, Alexandros T. Demos | 2005-04-12 |