Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936551 | Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices | Farhad Moghadam, Jun Zhao, Rick J. Roberts, Li-Qun Xia, Alexandros T. Demos | 2005-08-30 |
| 6896955 | Ionic additives for extreme low dielectric constant chemical formulations | Robert P. Mandal, Alexandros T. Demos, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2005-05-24 |
| 6875687 | Capping layer for extreme low dielectric constant films | Michael P. Nault, Josephine Chang | 2005-04-05 |
| 6841341 | Method of depositing an amorphous carbon layer | Kevin Fairbairn, Michael R. Rice, Christopher S. Ngai, Ian Latchford, Christopher Dennis Bencher +1 more | 2005-01-11 |