Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967072 | Photolithography scheme using a silicon containing resist | Christopher Dennis Bencher, Yuxiang Wang, Mario D. Silvetti | 2005-11-22 |
| 6913868 | Conductive bi-layer e-beam resist with amorphous carbon | Christopher Dennis Bencher | 2005-07-05 |
| 6868856 | Enhanced remote plasma cleaning | Thomas Nowak, Tsutomu Tanaka, Bok Heon Kim, Ping Xu, Jason K. Foster +2 more | 2005-03-22 |
| 6841341 | Method of depositing an amorphous carbon layer | Kevin Fairbairn, Michael R. Rice, Timothy Weidman, Christopher S. Ngai, Christopher Dennis Bencher +1 more | 2005-01-11 |