Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967072 | Photolithography scheme using a silicon containing resist | Ian Latchford, Yuxiang Wang, Mario D. Silvetti | 2005-11-22 |
| 6951826 | Silicon carbide deposition for use as a low dielectric constant anti-reflective coating | Joe Feng, Mei-Yee Shek, Chris Ngai, Judy H. Huang | 2005-10-04 |
| 6946401 | Plasma treatment for copper oxide reduction | Judy H. Huang, Sudha Rathi, Christopher S. Ngai, Bok Hoen Kim | 2005-09-20 |
| 6927178 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sudha Rathi, Sang-Hoon Ahn, Yuxiang Wang, Hichem M'Saad +4 more | 2005-08-09 |
| 6924191 | Method for fabricating a gate structure of a field effect transistor | Wei Liu, Thorsten Lill, David Mui | 2005-08-02 |
| 6913868 | Conductive bi-layer e-beam resist with amorphous carbon | Ian Latchford | 2005-07-05 |
| 6853043 | Nitrogen-free antireflective coating for use with photolithographic patterning | Wendy H. Yeh, Sang-Hoon Ahn, Hichem M'Saad, Sudha Rathi | 2005-02-08 |
| 6852647 | Removable amorphous carbon CMP stop | — | 2005-02-08 |
| 6841341 | Method of depositing an amorphous carbon layer | Kevin Fairbairn, Michael R. Rice, Timothy Weidman, Christopher S. Ngai, Ian Latchford +1 more | 2005-01-11 |