Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960416 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | David Mui, Hiroki Sasano | 2005-11-01 |
| 6924088 | Method and system for realtime CD microloading control | David Mui, Shashank Deshmukh, Hiroki Sasano | 2005-08-02 |
| 6924191 | Method for fabricating a gate structure of a field effect transistor | Thorsten Lill, David Mui, Christopher Dennis Bencher | 2005-08-02 |
| 6911399 | Method of controlling critical dimension microloading of photoresist trimming process by selective sidewall polymer deposition | David Mui | 2005-06-28 |
| 6858361 | Methodology for repeatable post etch CD in a production tool | David Mui, Hiroki Sasano | 2005-02-22 |
| 6849151 | Monitoring substrate processing by detecting reflectively diffracted light | Michael Barnes, John Holland, David Mui | 2005-02-01 |