Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960416 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | David Mui, Wei Liu | 2005-11-01 |
| 6924088 | Method and system for realtime CD microloading control | David Mui, Wei Liu, Shashank Deshmukh | 2005-08-02 |
| 6858361 | Methodology for repeatable post etch CD in a production tool | David Mui, Wei Liu | 2005-02-22 |