Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974766 | In situ deposition of a low κ dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application | — | 2005-12-13 |
| 6951826 | Silicon carbide deposition for use as a low dielectric constant anti-reflective coating | Christopher Dennis Bencher, Joe Feng, Mei-Yee Shek, Chris Ngai | 2005-10-04 |
| 6946401 | Plasma treatment for copper oxide reduction | Christopher Dennis Bencher, Sudha Rathi, Christopher S. Ngai, Bok Hoen Kim | 2005-09-20 |
| 6858153 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2005-02-22 |