Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946401 | Plasma treatment for copper oxide reduction | Judy H. Huang, Christopher Dennis Bencher, Christopher S. Ngai, Bok Hoen Kim | 2005-09-20 |
| 6927178 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sang-Hoon Ahn, Christopher Dennis Bencher, Yuxiang Wang, Hichem M'Saad +4 more | 2005-08-09 |
| 6853043 | Nitrogen-free antireflective coating for use with photolithographic patterning | Wendy H. Yeh, Sang-Hoon Ahn, Christopher Dennis Bencher, Hichem M'Saad | 2005-02-08 |