Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926926 | Silicon carbide deposited by high density plasma chemical-vapor deposition with bias | Seon-Mee Cho, Farhad Moghadam | 2005-08-09 |
| 6927178 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sudha Rathi, Sang-Hoon Ahn, Christopher Dennis Bencher, Yuxiang Wang +4 more | 2005-08-09 |
| 6853043 | Nitrogen-free antireflective coating for use with photolithographic patterning | Wendy H. Yeh, Sang-Hoon Ahn, Christopher Dennis Bencher, Sudha Rathi | 2005-02-08 |