Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943127 | CVD plasma assisted lower dielectric constant SICOH film | Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2005-09-13 |
| 6926926 | Silicon carbide deposited by high density plasma chemical-vapor deposition with bias | Hichem M'Saad, Farhad Moghadam | 2005-08-09 |