Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943127 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Li-Qun Xia +2 more | 2005-09-13 |
| 6902629 | Method for cleaning a process chamber | Yi Zheng, Vinita Singh, Srinivas D. Nemani, Ju-Hyung Lee, Shankar Venkataraman | 2005-06-07 |