Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943127 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Chi-I Lang, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2005-09-13 |
| 6911403 | Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics | Lihua Li, Tsutomu Tanaka, Tzu-Fang Huang, Li-Qun Xia, Dian Sugiarto +2 more | 2005-06-28 |
| 6838393 | Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide | Kang Sub Yim, Melissa M. Tam, Dian Sugiarto, Chi-I Lang, Li-Qun Xia | 2005-01-04 |