Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936309 | Hardness improvement of silicon carboxy films | Lihua Li, Li-Qun Xia, Ellie Yieh | 2005-08-30 |
| 6914014 | Method for curing low dielectric constant film using direct current bias | Lihua Li, Li-Qun Xia, Juan Carlos Rocha-Alvarez, Maosheng Zhao | 2005-07-05 |
| 6911403 | Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics | Lihua Li, Tsutomu Tanaka, Li-Qun Xia, Dian Sugiarto, Visweswaren Sivaramakrishnan +2 more | 2005-06-28 |