Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946033 | Heated gas distribution plate for a processing chamber | Lun Tsuei, Soovo Sen, Ju-Hyung Lee, Juan Carlos Rocha-Alvarez, Inna Shmurun +2 more | 2005-09-20 |
| 6932092 | Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energy | Juan Carlos Rocha-Alvarez, Shankar Venkataraman | 2005-08-23 |
| 6923189 | Cleaning of CVD chambers using remote source with cxfyoz based chemistry | Annamalai Lakshmanan, Ju-Hyung Lee, Troy Kim, Shankar Venkataraman | 2005-08-02 |
| 6914014 | Method for curing low dielectric constant film using direct current bias | Lihua Li, Tzu-Fang Huang, Li-Qun Xia, Juan Carlos Rocha-Alvarez | 2005-07-05 |