Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6923189 | Cleaning of CVD chambers using remote source with cxfyoz based chemistry | Ju-Hyung Lee, Troy Kim, Maosheng Zhao, Shankar Venkataraman | 2005-08-02 |
AL
Annamalai Lakshmanan
Overall (2005): #237,197 of 245,428Top 100%
1
Patents 2005