Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946033 | Heated gas distribution plate for a processing chamber | Lun Tsuei, Soovo Sen, Ju-Hyung Lee, Juan Carlos Rocha-Alvarez, Inna Shmurun +2 more | 2005-09-20 |
| 6923189 | Cleaning of CVD chambers using remote source with cxfyoz based chemistry | Annamalai Lakshmanan, Ju-Hyung Lee, Maosheng Zhao, Shankar Venkataraman | 2005-08-02 |