Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946033 | Heated gas distribution plate for a processing chamber | Lun Tsuei, Ju-Hyung Lee, Juan Carlos Rocha-Alvarez, Inna Shmurun, Maosheng Zhao +2 more | 2005-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946033 | Heated gas distribution plate for a processing chamber | Lun Tsuei, Ju-Hyung Lee, Juan Carlos Rocha-Alvarez, Inna Shmurun, Maosheng Zhao +2 more | 2005-09-20 |