Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943127 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Chen-An Chen +2 more | 2005-09-13 |
| 6936309 | Hardness improvement of silicon carboxy films | Lihua Li, Tzu-Fang Huang, Li-Qun Xia | 2005-08-30 |
| 6890850 | Method of depositing dielectric materials in damascene applications | Ju-Hyung Lee, Ping Xu, Shankar Venkataraman, Li-Qun Xia, Fei Han +5 more | 2005-05-10 |
| 6875558 | Integration scheme using self-planarized dielectric layer for shallow trench isolation (STI) | Frederic Gaillard, Fabrice Geiger | 2005-04-05 |
| 6858923 | Post-deposition treatment to enhance properties of Si-O-C low films | Li-Qun Xia, Frederic Gaillard, Tian-Hoe Lim | 2005-02-22 |