Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890850 | Method of depositing dielectric materials in damascene applications | Ju-Hyung Lee, Shankar Venkataraman, Li-Qun Xia, Fei Han, Ellie Yieh +5 more | 2005-05-10 |
| 6868856 | Enhanced remote plasma cleaning | Thomas Nowak, Ian Latchford, Tsutomu Tanaka, Bok Heon Kim, Jason K. Foster +2 more | 2005-03-22 |
| 6849562 | Method of depositing a low k dielectric barrier film for copper damascene application | Chi-I Lang, Li-Qun Xia, Louis Yang | 2005-02-01 |