Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6849562 | Method of depositing a low k dielectric barrier film for copper damascene application | Chi-I Lang, Li-Qun Xia, Ping Xu | 2005-02-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6849562 | Method of depositing a low k dielectric barrier film for copper damascene application | Chi-I Lang, Li-Qun Xia, Ping Xu | 2005-02-01 |