Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6868856 | Enhanced remote plasma cleaning | Ian Latchford, Tsutomu Tanaka, Bok Heon Kim, Ping Xu, Jason K. Foster +2 more | 2005-03-22 |
| 6863019 | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas | Shamouil Shamouilian, Canfeng Lai, Michael S. Cox, Padmanabhan Krishnaraj, Tsutomu Tanaka +2 more | 2005-03-08 |
| 6843881 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Bok Hoen Kim, Nam Le, Martin Jay Seamons, Ameeta Madhava, Michael P. Nault +2 more | 2005-01-18 |