Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890597 | HDP-CVD uniformity control | Bruno Geoffrion, Michael S. Cox, Lin Zhang, Bikram Kapoor, Anchuan Wang +1 more | 2005-05-10 |
| 6869880 | In situ application of etch back for improved deposition into high-aspect-ratio features | Pavel Ionov, Canfeng Lai, Michael S. Cox, Shamouil Shamouilian | 2005-03-22 |
| 6863019 | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas | Shamouil Shamouilian, Canfeng Lai, Michael S. Cox, Tsutomu Tanaka, Sebastien Raoux +2 more | 2005-03-08 |