Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894474 | Non-intrusive plasma probe | Michael S. Cox, Qiwei Liang | 2005-05-17 |
| 6869880 | In situ application of etch back for improved deposition into high-aspect-ratio features | Padmanabhan Krishnaraj, Pavel Ionov, Michael S. Cox, Shamouil Shamouilian | 2005-03-22 |
| 6863019 | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas | Shamouil Shamouilian, Michael S. Cox, Padmanabhan Krishnaraj, Tsutomu Tanaka, Sebastien Raoux +2 more | 2005-03-08 |
| 6841006 | Atmospheric substrate processing apparatus for depositing multiple layers on a substrate | Michael Barnes, Michael S. Cox, John Parks | 2005-01-11 |