Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841006 | Atmospheric substrate processing apparatus for depositing multiple layers on a substrate | Michael Barnes, Michael S. Cox, Canfeng Lai | 2005-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841006 | Atmospheric substrate processing apparatus for depositing multiple layers on a substrate | Michael Barnes, Michael S. Cox, Canfeng Lai | 2005-01-11 |