Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894474 | Non-intrusive plasma probe | Canfeng Lai, Qiwei Liang | 2005-05-17 |
| 6890597 | HDP-CVD uniformity control | Padmanabhan Krishnaraj, Bruno Geoffrion, Lin Zhang, Bikram Kapoor, Anchuan Wang +1 more | 2005-05-10 |
| 6878644 | Multistep cure technique for spin-on-glass films | Zhenjiang Cui, Rick J. Roberts, Jun Zhao, Khaled A. Elsheref, Alexandros T. Demos | 2005-04-12 |
| 6869880 | In situ application of etch back for improved deposition into high-aspect-ratio features | Padmanabhan Krishnaraj, Pavel Ionov, Canfeng Lai, Shamouil Shamouilian | 2005-03-22 |
| 6863019 | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas | Shamouil Shamouilian, Canfeng Lai, Padmanabhan Krishnaraj, Tsutomu Tanaka, Sebastien Raoux +2 more | 2005-03-08 |
| 6841006 | Atmospheric substrate processing apparatus for depositing multiple layers on a substrate | Michael Barnes, Canfeng Lai, John Parks | 2005-01-11 |