Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936843 | Fixture used to prepare semiconductor specimens for film adhesion testing | — | 2005-08-30 |
| 6890597 | HDP-CVD uniformity control | Padmanabhan Krishnaraj, Bruno Geoffrion, Michael S. Cox, Lin Zhang, Bikram Kapoor +1 more | 2005-05-10 |
| 6878644 | Multistep cure technique for spin-on-glass films | Rick J. Roberts, Michael S. Cox, Jun Zhao, Khaled A. Elsheref, Alexandros T. Demos | 2005-04-12 |