Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890597 | HDP-CVD uniformity control | Padmanabhan Krishnaraj, Bruno Geoffrion, Michael S. Cox, Lin Zhang, Anchuan Wang +1 more | 2005-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890597 | HDP-CVD uniformity control | Padmanabhan Krishnaraj, Bruno Geoffrion, Michael S. Cox, Lin Zhang, Anchuan Wang +1 more | 2005-05-10 |