Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869880 | In situ application of etch back for improved deposition into high-aspect-ratio features | Padmanabhan Krishnaraj, Pavel Ionov, Canfeng Lai, Michael S. Cox | 2005-03-22 |
| 6863019 | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas | Canfeng Lai, Michael S. Cox, Padmanabhan Krishnaraj, Tsutomu Tanaka, Sebastien Raoux +2 more | 2005-03-08 |