Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6896955 | Ionic additives for extreme low dielectric constant chemical formulations | Robert P. Mandal, Alexandros T. Demos, Timothy Weidman, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2005-05-24 |
| 6875687 | Capping layer for extreme low dielectric constant films | Timothy Weidman, Josephine Chang | 2005-04-05 |
| 6843881 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Bok Hoen Kim, Nam Le, Martin Jay Seamons, Ameeta Madhava, Thomas Nowak +2 more | 2005-01-18 |