Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946401 | Plasma treatment for copper oxide reduction | Judy H. Huang, Christopher Dennis Bencher, Sudha Rathi, Christopher S. Ngai | 2005-09-20 |
| 6927178 | Nitrogen-free dielectric anti-reflective coating and hardmask | Sudha Rathi, Sang-Hoon Ahn, Christopher Dennis Bencher, Yuxiang Wang, Hichem M'Saad +4 more | 2005-08-09 |
| 6843881 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Nam Le, Martin Jay Seamons, Ameeta Madhava, Michael P. Nault, Thomas Nowak +2 more | 2005-01-18 |