Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913938 | Feedback control of plasma-enhanced chemical vapor deposition processes | Arulkumar Shanmugasundram, Alexander T. Schwarm, Ilias Iliopoulos, Alexander Parkhomovsky | 2005-07-05 |
| 6868856 | Enhanced remote plasma cleaning | Thomas Nowak, Ian Latchford, Tsutomu Tanaka, Bok Heon Kim, Ping Xu +2 more | 2005-03-22 |
| 6843881 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Bok Hoen Kim, Nam Le, Ameeta Madhava, Michael P. Nault, Thomas Nowak +2 more | 2005-01-18 |