Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913938 | Feedback control of plasma-enhanced chemical vapor deposition processes | Alexander T. Schwarm, Ilias Iliopoulos, Alexander Parkhomovsky, Martin Jay Seamons | 2005-07-05 |
| 6887124 | Method of polishing and cleaning substrates | Jay D. Pinson, II | 2005-05-03 |