Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913938 | Feedback control of plasma-enhanced chemical vapor deposition processes | Arulkumar Shanmugasundram, Ilias Iliopoulos, Alexander Parkhomovsky, Martin Jay Seamons | 2005-07-05 |