Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897163 | Method for depositing a low dielectric constant film | Srinivas D. Nemani | 2005-05-24 |
| 6875558 | Integration scheme using self-planarized dielectric layer for shallow trench isolation (STI) | Fabrice Geiger, Ellie Yieh | 2005-04-05 |
| 6858923 | Post-deposition treatment to enhance properties of Si-O-C low films | Li-Qun Xia, Ellie Yieh, Tian-Hoe Lim | 2005-02-22 |