Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902629 | Method for cleaning a process chamber | Yi Zheng, Vinita Singh, Chen-An Chen, Ju-Hyung Lee, Shankar Venkataraman | 2005-06-07 |
| 6897163 | Method for depositing a low dielectric constant film | Frederic Gaillard | 2005-05-24 |
| 6890850 | Method of depositing dielectric materials in damascene applications | Ju-Hyung Lee, Ping Xu, Shankar Venkataraman, Li-Qun Xia, Fei Han +5 more | 2005-05-10 |
| 6878620 | Side wall passivation films for damascene cu/low k electronic devices | Son V. Nguyen, Li-Qun Xia | 2005-04-12 |
| 6855484 | Method of depositing low dielectric constant silicon carbide layers | Francimar Campana, Michael Chapin, Shankar Venkataraman | 2005-02-15 |